光刻液晶显示器

photolithographed───n.影印石版画；照相平版印刷品；vt.影印石版

photolithographic───adj.光刻法的；照相平版印刷的

photolithography───n.影印石版术；照相平印术

photolithographically───光刻

photolithograph───n.影印石版画；照相平版印刷品；vt.影印石版

photolithographer───n.影印石版画；照相平版印刷品(photolithograph的变形)

photolithographing───n.影印石版画；照相平版印刷品；vt.影印石版

To make a TFT-LCD panel which has higher performance, fine patterning process of photolithography is needed. Making smaller via pattern is one of main issue for fine patter - ning.───为了获得更高性能的TFT - LCD面板，在光刻时保证精细的图形成像十分重要，其中，如何制作出尺寸更小的通孔图形是主要的问题之一。